Title :
A Batch-Fabricated Single-Layer Elastomeric Actuator With Corrugated Surface
Author :
Maleki, Teimour ; Chitnis, Girish ; Kim, Albert ; Ziaie, Babak
Author_Institution :
Birck Nanotechnol. Center, Purdue Univ., West Lafayette, IN, USA
Abstract :
In this paper, we report on the first lasermicromachined batch-fabricated single-layer elastomeric actuator with a corrugated surface profile. The structural material of the cantilever actuator is a single [polydimethylsiloxane (PDMS)] layer, and electrodes are soft lithographically patterned conductive carbon grease. The asymmetric corrugated surface provides a bending moment in a single PDMS layer without the need for a second inactive layer. An actuator which is 5 mm long, 1 mm wide, and 80 μm thick can generate up to 2-mm out-of-plane displacement with zero applied force and 15 μN at zero deflection while consuming 20 μW of static power when actuated with 500 V.
Keywords :
bending; cantilevers; carbon; elastomers; electrodes; greases; laser beam machining; lithography; microactuators; micromachining; PDMS; asymmetric corrugated surface; bending moment; cantilever actuator; corrugated surface profile; electrode; laser-micromachined batch-fabricated single-layer elastomeric actuator; polydimethylsiloxane; power 20 muW; size 1 mm; size 5 mm; size 80 mum; soft lithographically patterned conductive carbon grease; structural material; voltage 500 V; Actuators; Corrugated surfaces; Electrodes; Fabrication; Materials; Strain; Stress; Carbon grease; elastomeric actuators; electrostrictive polymers; laser micromachining; polydimethylsiloxane (PDMS);
Journal_Title :
Microelectromechanical Systems, Journal of
DOI :
10.1109/JMEMS.2012.2192909
