DocumentCode
1502053
Title
Displacement Sensing With a Mechanically Tunable Photonic Crystal
Author
Hadzialic, Sanja ; Kim, Sora ; Sarioglu, Ali Fatih ; Sudbo, Aasmund Sveinung ; Solgaard, Olav
Author_Institution
Inst. of Phys., Univ. of Oslo, Oslo, Norway
Volume
22
Issue
16
fYear
2010
Firstpage
1196
Lastpage
1198
Abstract
We demonstrate a mechanically tunable photonic crystal (PC) designed for highly position-sensitive reflection. Our device consists of a multilayer PC membrane attached to a silicon microelectromechanical system structure for lateral actuation. Inside each of the PC holes there is a pillar, which is attached to the substrate. By moving the PC membrane with respect to the pillars we change the shape of the PC holes and thereby modulate the PC reflectivity. Our measurements show a reflectivity change of more than 80% for a 115-nm lateral displacement.
Keywords
displacement measurement; microsensors; optical tuning; photonic crystals; silicon; PC reflectivity; displacement sensing; lateral actuation; lateral displacement; mechanically tunable photonic crystal; position-sensitive reflection; silicon microelectromechanical system; Displacement sensor; optical modulator; photonic crystal (PC) devices; photonic crystal (PC) sensor; tunable photonic crystal (PC);
fLanguage
English
Journal_Title
Photonics Technology Letters, IEEE
Publisher
ieee
ISSN
1041-1135
Type
jour
DOI
10.1109/LPT.2010.2050584
Filename
5471240
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