Title :
Displacement Sensing With a Mechanically Tunable Photonic Crystal
Author :
Hadzialic, Sanja ; Kim, Sora ; Sarioglu, Ali Fatih ; Sudbo, Aasmund Sveinung ; Solgaard, Olav
Author_Institution :
Inst. of Phys., Univ. of Oslo, Oslo, Norway
Abstract :
We demonstrate a mechanically tunable photonic crystal (PC) designed for highly position-sensitive reflection. Our device consists of a multilayer PC membrane attached to a silicon microelectromechanical system structure for lateral actuation. Inside each of the PC holes there is a pillar, which is attached to the substrate. By moving the PC membrane with respect to the pillars we change the shape of the PC holes and thereby modulate the PC reflectivity. Our measurements show a reflectivity change of more than 80% for a 115-nm lateral displacement.
Keywords :
displacement measurement; microsensors; optical tuning; photonic crystals; silicon; PC reflectivity; displacement sensing; lateral actuation; lateral displacement; mechanically tunable photonic crystal; position-sensitive reflection; silicon microelectromechanical system; Displacement sensor; optical modulator; photonic crystal (PC) devices; photonic crystal (PC) sensor; tunable photonic crystal (PC);
Journal_Title :
Photonics Technology Letters, IEEE
DOI :
10.1109/LPT.2010.2050584
