Title :
Semi-Analytical Magneto-Mechanic Coupling With Contact Analysis for MEMS/NEMS
Author :
Pham Quang, P. ; Delinchant, Benoit ; Coulomb, J.L. ; du Peloux, B.
Author_Institution :
G2ELab, Grenoble Electr. Eng. Lab., St. Martin d´Heres, France
fDate :
5/1/2011 12:00:00 AM
Abstract :
This paper presents a methodology and a tool for magnetic and mechanical deformation coupling using numerical and analytical modeling. An analytical magnetic model using Coulombian approach is used and coupled with a mechanical deformation model for a cantilever beam to evaluate contact size and contact force. Such a coupling is not available using numerical solution. This paper details the deformation and contact analysis, which is validated by finite element simulation and also details the coupling approach. Such a modeling is dedicated to an optimization process of magnetic MEMS/NEMS in general and to magnetic nano switch in particular.
Keywords :
beams (structures); cantilevers; deformation; finite element analysis; magnetic devices; magnetomechanical effects; mechanical contact; microswitches; nanoelectromechanical devices; optimisation; Coulombian approach; cantilever beam; contact force; contact size; deformation; finite element simulation; magnetic MEMS; magnetic NEMS; magnetic nanoswitch; optimization; semianalytical magneto-mechanic coupling; Couplings; Deformable models; Force; Magnetic analysis; Magnetomechanical effects; Numerical models; Switches; Contact analysis; magnetic switches; magneto mechanic coupling;
Journal_Title :
Magnetics, IEEE Transactions on
DOI :
10.1109/TMAG.2010.2080662
