Title :
Calculation of reactor impedance for helicon discharge
Author :
Park, B.H. ; Yoon, N.S. ; Choi, Duk-In
Author_Institution :
Dept. of Phys., Korea Adv. Inst. of Sci. & Technol., Seoul, South Korea
fDate :
6/1/2001 12:00:00 AM
Abstract :
We solve the Maxwell-Boltzmann equations and calculate reactor impedance for helicon device with the Nagoya type III antenna using a finite, width modeling of antenna current and inspect the dependence of various components of impedance on discharge parameters. The total resistance is divided into various components such as electron-ion contributions and axial-perpendicular field contributions. Moreover, the total resistance can be approximately expressed as the sum of TG and helicon contributions in a wide range of parameters
Keywords :
antennas in plasma; discharges (electric); plasma devices; plasma transport processes; Maxwell-Boltzmann equations; Nagoya type III antenna; antenna current; axial-perpendicular field contributions; discharge parameters; electron-ion contributions; finite width modeling; helicon device; helicon discharge; reactor impedance; total resistance; Antenna accessories; Boundary conditions; Heating; Impedance; Inductors; Maxwell equations; Plasma applications; Plasma devices; Plasma properties; Plasma sources;
Journal_Title :
Plasma Science, IEEE Transactions on
