Frequency Scalable Model for MEMS Capacitive Shunt Switches at Millimeter-Wave Frequencies

Author

Puyal, Vincent ; Dragomirescu, Daniela ; Villeneuve, Christina ; Ruan, Jinyu ; Pons, Patrick ; Plana, Robert

Author_Institution

Lab. d´´Archit. et d´´Analyse des Syst. (LAAS), Centre Nat. de la Rech. Sci. (CNRS), Toulouse, France

Volume

57

Issue

11

fYear

2009

Firstpage

2824

Lastpage

2833

Abstract

This paper presents an approach to RF microelectromechanical systems (MEMS) capacitive shunt switch design from K-band up to W-band based on the scalability of the RF MEMS switch with frequency. The parameters of the switch´s equivalent-circuit model also follow scaling rules. The measurement results of the fabricated switches show an excellent agreement with simulations that allow to validate the MEMS model in the entire band from 20 up to 94 GHz. This model is going to be used in the phase shifter circuit design for antenna array applications. The first 60-GHz phase shifter results are also reported here.

Keywords

equivalent circuits; microswitches; millimetre wave phase shifters; MEMS capacitive shunt switches; equivalent-circuit model; fequency scalable model; frequency 20 GHz to 94 GHz; millimeter-wave devices; phase shifter; Capacitive; RF microelectromechanical systems (MEMS); modeling; phase shifters; shunt switches;

fLanguage

English

Journal_Title

Microwave Theory and Techniques, IEEE Transactions on

Publisher

ieee

ISSN

0018-9480

Type

jour

DOI

10.1109/TMTT.2009.2032473

Filename

5290128