Title :
Correction to "semiconductor characterization and analytical technology"
Author :
Shaffner, Thomas J.
Author_Institution :
National Institute of Standards and Technology
fDate :
5/1/2001 12:00:00 AM
Keywords :
Crystalline materials; Diffraction; Equations; Impurities; Kinematics; Lattices; Paper technology; Particle measurements; Position measurement; Silicon;
Journal_Title :
Proceedings of the IEEE
DOI :
10.1109/JPROC.2001.929654
