• DocumentCode
    1503408
  • Title

    Schottky-Ohmic Drain AlGaN/GaN Normally Off HEMT With Reverse Drain Blocking Capability

  • Author

    Zhou, Chunhua ; Chen, W. ; Piner, Edwin L. ; Chen, Kevin J.

  • Author_Institution
    Dept. of Electron. & Comput. Eng., Hong Kong Univ. of Sci. & Technol., Kowloon, China
  • Volume
    31
  • Issue
    7
  • fYear
    2010
  • fDate
    7/1/2010 12:00:00 AM
  • Firstpage
    668
  • Lastpage
    670
  • Abstract
    In this letter, we propose an AlGaN/GaN normally off high-electron mobility transistor (HEMT) with reverse drain blocking capability. The device features a Schottky-ohmic drain electrode in which a Schottky-controlled normally off channel is inserted between the gate and the conventional ohmic drain contact. Under negative reverse drain bias, the normally off channel provides an energy barrier that effectively blocks the reverse current conduction while contributing only 0.55 V onset voltage in the forward-biased on state. In a device with a gate-drain distance of 9 m, a reverse blocking voltage of -321 V was obtained at VGS = 0 V, comparable with the forward blocking voltage of 351 V; at VGS = 3 V, the reverse blocking voltage was -276 V. The new HEMT also exhibits no degradation in drain saturation current and does not need extra photomask or process steps to fabricate. When forward biased at VGS = 3 V , the proposed device achieved a specific on resistance of 1.97 mΩ · m2.
  • Keywords
    III-V semiconductors; Schottky barriers; aluminium compounds; gallium compounds; high electron mobility transistors; ohmic contacts; AlGaN-GaN; Schottky-controlled normally off channel; Schottky-ohmic drain electrode; Schottky-ohmic drain normally off HEMT; degradation; drain saturation current; energy barrier; forward blocking voltage; gate-drain distance; negative reverse drain bias; ohmic drain contact; photomask; reverse blocking voltage; reverse current conduction; reverse drain blocking capability; voltage -276 V; voltage -321 V; voltage 351 V; AlGaN/GaN normally off high-electron mobility transistor (HEMT); Schottky-ohmic drain; fluorine plasma ion implantation; reverse drain blocking capability;
  • fLanguage
    English
  • Journal_Title
    Electron Device Letters, IEEE
  • Publisher
    ieee
  • ISSN
    0741-3106
  • Type

    jour

  • DOI
    10.1109/LED.2010.2048885
  • Filename
    5473042