DocumentCode
1503531
Title
Design and finite element analysis of weighted-stiffness microelectromechanical digital-to-analogue converters
Author
Liu, Qingquan ; Huang, Qing-An
Author_Institution
Microelectron. Center, Southeast Univ., Nanjing, China
Volume
37
Issue
12
fYear
2001
fDate
6/7/2001 12:00:00 AM
Firstpage
755
Lastpage
756
Abstract
A microelectromechanical digital-to-analogue converter (DAC) based on the weighted-stiffness (WS) principle analogous to a weighted-resistor DAC for use in electronic circuits is proposed. To convert the digital voltage input to the analogue displacement, the stiffness of the vertical beams is employed as the scale factor. Finite element analysis and design optimisation are performed. Simulation shows that the error for the proposed DAC is less than 0.001 μm
Keywords
digital-analogue conversion; finite element analysis; micromechanical devices; design optimisation; finite element analysis; numerical simulation; weighted-stiffness microelectromechanical digital-to-analogue converter;
fLanguage
English
Journal_Title
Electronics Letters
Publisher
iet
ISSN
0013-5194
Type
jour
DOI
10.1049/el:20010528
Filename
929676
Link To Document