Title :
Love mode layered surface acoustic wave filters
Author :
Kalantar-Zadeh, K. ; Wlodarski, W. ; Galatsis, K.
Author_Institution :
Sch. of Electr. & Comput. Syst. Eng., R. Melbourne Inst. of Technol. Univ., Vic., Australia
fDate :
6/7/2001 12:00:00 AM
Abstract :
Novel surface acoustic wave filters have been developed by depositing SiO2 and ZnO thin films onto 90° rotated ST-cut quartz crystal substrates. Up to 19 dB insertion loss improvement was obtained for the filter with a ZnO film. The filters have no coupling with other wave propagating modes, exhibiting only one passband
Keywords :
band-pass filters; losses; piezoelectric thin films; quartz; radiofrequency filters; silicon compounds; sputter deposition; sputtered coatings; surface acoustic wave filters; zinc compounds; 19 dB; Love mode layered SAW filters; RF filters; ST-cut quartz crystal substrates; SiO2; SiO2 thin films; SiO2-SiO2; ZnO thin films; ZnO-SiO2; insertion loss improvement; surface acoustic wave filters;
Journal_Title :
Electronics Letters
DOI :
10.1049/el:20010447