Title :
A low-cost high-performance cleanroom enclosure
Author :
Hutchins, J.B. ; Martin, M.D. ; Belolipetskiy, S. ; Cox, H.L., Jr. ; Pitts, W.K. ; Walsh, K.M.
Author_Institution :
Dept. of Phys., Louisville Univ., KY, USA
fDate :
5/1/1999 12:00:00 AM
Abstract :
A conventional laboratory room was converted into a cleanroom for laser microfabrication. These simple techniques resulted in a measured class 100 environment at the surface of the optical table, well beyond the class 1000 design goal. The total conversion costs were approximately 40% the cost of a comparable commercial modular cleanroom, sufficiently inexpensive for the development of microfabrication instructional laboratories
Keywords :
clean rooms; electronic engineering education; laser beam machining; micromachining; laboratory room; laser microfabrication; low-cost high-performance cleanroom enclosure; measured class 100 environment; microelectronics; microfabrication instructional laboratories; micromachining; optical table surface; Contamination; Costs; Floors; Laboratories; Optical design; Optical design techniques; Optical filters; Plastics; Pollution measurement; Tiles;
Journal_Title :
Education, IEEE Transactions on
