• DocumentCode
    1505630
  • Title

    Two-dimensional mapping of electron distribution functions in low pressure ICP

  • Author

    Heil, B. ; Kortshagen, U.

  • Author_Institution
    Dept. of Mech. Eng., Minnesota Univ., Minneapolis, MN, USA
  • Volume
    27
  • Issue
    1
  • fYear
    1999
  • fDate
    2/1/1999 12:00:00 AM
  • Firstpage
    56
  • Lastpage
    57
  • Abstract
    Two-dimensionally resolved Langmuir probe measurements of electron distribution functions (EDF) have been performed in a low pressure inductively coupled plasma. The measurements confirm nonlocal behavior of the EDF at low pressures while deviations from the nonlocality of the EDF are observed at higher pressures. The experimental results are discussed in terms of the energy relaxation length of the electrons
  • Keywords
    Langmuir probes; discharges (electric); plasma properties; relaxation; electron distribution functions; electron energy relaxation; energy relaxation length; low pressure ICP; low pressure inductively coupled plasma; nonlocal behavior; nonlocality; two-dimensional mapping; two-dimensionally resolved Langmuir probe measurements; Argon; Coils; Distribution functions; Electrons; Performance evaluation; Plasma measurements; Predictive models; Pressure measurement; Probes; Surface discharges;
  • fLanguage
    English
  • Journal_Title
    Plasma Science, IEEE Transactions on
  • Publisher
    ieee
  • ISSN
    0093-3813
  • Type

    jour

  • DOI
    10.1109/27.763032
  • Filename
    763032
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=1505630