Title :
Two-dimensional mapping of electron distribution functions in low pressure ICP
Author :
Heil, B. ; Kortshagen, U.
Author_Institution :
Dept. of Mech. Eng., Minnesota Univ., Minneapolis, MN, USA
fDate :
2/1/1999 12:00:00 AM
Abstract :
Two-dimensionally resolved Langmuir probe measurements of electron distribution functions (EDF) have been performed in a low pressure inductively coupled plasma. The measurements confirm nonlocal behavior of the EDF at low pressures while deviations from the nonlocality of the EDF are observed at higher pressures. The experimental results are discussed in terms of the energy relaxation length of the electrons
Keywords :
Langmuir probes; discharges (electric); plasma properties; relaxation; electron distribution functions; electron energy relaxation; energy relaxation length; low pressure ICP; low pressure inductively coupled plasma; nonlocal behavior; nonlocality; two-dimensional mapping; two-dimensionally resolved Langmuir probe measurements; Argon; Coils; Distribution functions; Electrons; Performance evaluation; Plasma measurements; Predictive models; Pressure measurement; Probes; Surface discharges;
Journal_Title :
Plasma Science, IEEE Transactions on
