Title :
Electrical control of plasma spatial uniformity investigated by planar laser-induced fluorescence
Author :
Steffens, Kristen L. ; Sobolewski, Mark A.
Author_Institution :
Nat. Inst. of Stand. & Technol., Gaithersburg, MD, USA
fDate :
2/1/1999 12:00:00 AM
Abstract :
Planar laser-induced fluorescence was performed in the parallel-plate gaseous electronics conference reference cell to determine two-dimensional maps of the CF2 radical in 89% CF 4/11% O2 chamber-cleaning plasmas. The spatial characteristics of the CF2 density and of broadband optical emission were controlled by varying the current at the upper electrode by adjusting the impedance between the upper electrode and ground. The results suggest that electrical control of the current paths through the plasma could be used to control the spatial distribution of reactive chemical species, aiding in the optimization of chamber-cleaning plasmas
Keywords :
fluorescence; free radicals; organic compounds; oxygen; photoluminescence; plasma CVD; plasma density; plasma diagnostics; plasma-wall interactions; surface cleaning; CF2 radical; O2; broadband optical emission; carbon tetrafluoride; chamber-cleaning plasmas; current paths; density; electrical control; parallel-plate gaseous electronics conference reference cell; planar laser-induced fluorescence; plasma spatial uniformity; reactive chemical species; spatial characteristics; spatial distribution; tetrafluoromethane-O2 chamber-cleaning plasma; two-dimensional maps; upper electrode; Chemicals; Electrodes; Fluorescence; Gas lasers; Impedance; Optical control; Plasma chemistry; Plasma density; Plasma properties; Stimulated emission;
Journal_Title :
Plasma Science, IEEE Transactions on
