Evaluation of the plasma distribution of a quasi-linear constricted plasma source

Author

Anders, André ; MacGill, Robert A. ; Rubin, Michael

Author_Institution

Lawrence Berkeley Nat. Lab., California Univ., Berkeley, CA, USA

Volume

27

Issue

1

fYear

1999

fDate

2/1/1999 12:00:00 AM

Firstpage

82

Lastpage

83

Abstract

The quasi-linear constricted plasma source is a downstream plasma source with ten linearly aligned discharge cells. Each cell operates on the basis of a constricted glow discharge. The plasma output can easily be monitored by the plasma-emitted light. The information is not only intuitive but can also he used to operate on-line feedback control of the plasma source which is important for large-area plasma processing of materials

Keywords

glow discharges; plasma diagnostics; plasma flow; plasma materials processing; plasma production; constricted glow discharge; downstream plasma source; gas plasma flow; large-area plasma processing; linearly aligned discharge cells; on-line feedback control; plasma diagnostics; plasma distribution; plasma material processing; plasma output monitoring; plasma source; plasma-emitted light; quasi-linear constricted plasma source; Anodes; Cathodes; Electrodes; Electrons; Fault location; Glow discharges; Plasma applications; Plasma diagnostics; Plasma materials processing; Plasma sources;

fLanguage

English

Journal_Title

Plasma Science, IEEE Transactions on

Publisher

ieee

ISSN

0093-3813

Type

jour

DOI

10.1109/27.763051

Filename

763051