• DocumentCode
    1505742
  • Title

    Chaotic dynamics of three-dimensional DC magnetron discharge

  • Author

    Kondo, Shuji ; Nanbu, Kenichi

  • Author_Institution
    Inst. of Fluid Sci., Tohoku Univ., Sendai, Japan
  • Volume
    27
  • Issue
    1
  • fYear
    1999
  • fDate
    2/1/1999 12:00:00 AM
  • Firstpage
    92
  • Lastpage
    93
  • Abstract
    By the use of the particle-in-cell/Monte Carlo method, it is found that DC magnetron discharges show either of two patterns, real steady state and chaotic steady state. Which occurs depends on the discharge conditions. Here three-dimensional images of the chaotic steady state are illustrated
  • Keywords
    Monte Carlo methods; chaos; discharges (electric); magnetrons; plasma density; plasma instability; plasma simulation; chaotic dynamics; chaotic steady state; discharge conditions; instability; particle simulation; particle-in-cell/Monte Carlo method; real steady state; three-dimensional DC magnetron discharge; three-dimensional images; Argon; Cathodes; Chaos; Electrodes; Electrons; Magnets; Plasma simulation; Plasma waves; Sputtering; Steady-state;
  • fLanguage
    English
  • Journal_Title
    Plasma Science, IEEE Transactions on
  • Publisher
    ieee
  • ISSN
    0093-3813
  • Type

    jour

  • DOI
    10.1109/27.763058
  • Filename
    763058
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=1505742