Evolution of the two-dimensional axisymmetric charged particle density in a radio frequency planar magnetron via a PIC-MCC simulation

Author

Minea, T.M. ; Bretagne, J. ; Gousset, G.

Author_Institution

Lab. de Phys. des Gaz et des Plasmas, Univ. de Paris-Sud, Orsay, France

Volume

27

Issue

1

fYear

1999

fDate

2/1/1999 12:00:00 AM

Firstpage

94

Lastpage

95

Abstract

A two-dimensional (2-D) time resolved PIC-MCC simulation implemented on a parallel machine is developed for the modeling of an RF planar magnetron discharge. Preliminary results of the self-consistent plasma model are presented. Instantaneous electron and ion 2-D density distributions are reported

Keywords

high-frequency discharges; magnetrons; plasma density; plasma simulation; PIC-MCC simulation; RF planar magnetron discharge modelling; electron 2-D density distributions; ion 2-D density distributions; parallel machine; radio frequency planar magnetron; self-consistent plasma model; two-dimensional axisymmetric charged particle density; two-dimensional time resolved PIC-MCC simulation; unbalanced magnetron; Electrons; Magnetic devices; Magnetic fields; Plasma applications; Plasma density; Plasma devices; Plasma simulation; Radio frequency; Sputtering; Toroidal magnetic fields;

fLanguage

English

Journal_Title

Plasma Science, IEEE Transactions on

Publisher

ieee

ISSN

0093-3813

Type

jour

DOI

10.1109/27.763060

Filename

763060