Science and applications of energy beam ablation

Author

Gilgenbach, Ronald M. ; Kovaleski, Scott D. ; Lash, J.S. ; Ang, Lay-Kee ; Lau, Y.Y.

Author_Institution

Dept. of Radiol. Sci., Michigan Univ., Ann Arbor, MI, USA

Volume

27

Issue

1

fYear

1999

fDate

2/1/1999 12:00:00 AM

Firstpage

150

Lastpage

158

Abstract

This article reviews the advances in the science and applications of energy beam ablation of materials at the University of Michigan. Types of energy beams applied to materials ablation are: excimer lasers, laser-ablation-assisted plasma discharges, and channelspark electron beams. The characteristics of the ablation plasma plumes generated by these energy deposition sources are discussed and compared. Plume expansion velocities are in the range of cm/μs for all three types of ablation plumes. Electron beam ablation plumes show higher ionization states than laser ablation plumes

Keywords

discharges (electric); electron beam effects; excimer lasers; laser ablation; plasma diagnostics; plasma flow; University of Michigan; ablation plasma plumes; channelspark electron beams; energy beam ablation plumes; energy beams; energy deposition sources; excimer lasers; ionisation states; laser-ablation-assisted plasma discharges; plume expansion velocities; Electron beams; Laser ablation; Laser beams; Laser theory; Optical materials; Particle beams; Plasma applications; Plasma materials processing; Plasma properties; Plasma sources;

fLanguage

English

Journal_Title

Plasma Science, IEEE Transactions on

Publisher

ieee

ISSN

0093-3813

Type

jour

DOI

10.1109/27.763103

Filename

763103