Title :
Science and applications of energy beam ablation
Author :
Gilgenbach, Ronald M. ; Kovaleski, Scott D. ; Lash, J.S. ; Ang, Lay-Kee ; Lau, Y.Y.
Author_Institution :
Dept. of Radiol. Sci., Michigan Univ., Ann Arbor, MI, USA
fDate :
2/1/1999 12:00:00 AM
Abstract :
This article reviews the advances in the science and applications of energy beam ablation of materials at the University of Michigan. Types of energy beams applied to materials ablation are: excimer lasers, laser-ablation-assisted plasma discharges, and channelspark electron beams. The characteristics of the ablation plasma plumes generated by these energy deposition sources are discussed and compared. Plume expansion velocities are in the range of cm/μs for all three types of ablation plumes. Electron beam ablation plumes show higher ionization states than laser ablation plumes
Keywords :
discharges (electric); electron beam effects; excimer lasers; laser ablation; plasma diagnostics; plasma flow; University of Michigan; ablation plasma plumes; channelspark electron beams; energy beam ablation plumes; energy beams; energy deposition sources; excimer lasers; ionisation states; laser-ablation-assisted plasma discharges; plume expansion velocities; Electron beams; Laser ablation; Laser beams; Laser theory; Optical materials; Particle beams; Plasma applications; Plasma materials processing; Plasma properties; Plasma sources;
Journal_Title :
Plasma Science, IEEE Transactions on
