• DocumentCode
    1506516
  • Title

    Fabrication of High-Aspect-Ratio Alumina–Nickel Coaxial Nanorod Array by Electrodeposition

  • Author

    Hsu, Chi-Wei ; Chou, Zhong-De ; Wang, Gou-Jen

  • Author_Institution
    Dept. of Mech. Eng., Nat. Chung-Hsing Univ., Taichung, Taiwan
  • Volume
    19
  • Issue
    4
  • fYear
    2010
  • Firstpage
    849
  • Lastpage
    853
  • Abstract
    In this paper, we investigate the fabrication of high-aspect-ratio (~500) larger area alumina-metal coaxial nanorod arrays using electrodeposition with an anodic aluminum oxide template. An annealing process was implemented after electrodeposition to enhance the mechanical properties of the deposited metal nanorods. Phosphoric acid was then used to gradually etch off the alumina that enclosed each individual metal nanorod starting from the borders between the hexagonal cells. The transmission electron microscopy and selected area electron diffraction analyses were implemented to verify the alumina/nickel coaxial structure. The alumina shell wrapping each individual metal nanorod served as an insulator for the core metal. The high aspect ratio of the alumina-metal coaxial nanorods described herein makes them practicable for use as nanoprobes or electrodes that are capable of penetrating individual cell membranes to sense the biological functions of the cells.
  • Keywords
    alumina; annealing; electrodeposition; electrodes; electron diffraction; nanofabrication; nanorods; nickel; transmission electron microscopy; Al2O3-Ni; alumina shell wrapping; alumina-nickel coaxial nanorod array; alumina-nickel coaxial structure; annealing process; anodic aluminum oxide template; biological functions; electrodeposition; electrodes; etching; hexagonal cells; high-aspect-ratio; mechanical properties; metal nanorods; nanoprobes; penetrating individual cell membranes; phosphoric acid; selected area electron diffraction analysis; transmission electron microscopy; Anodic aluminum oxide (AAO) template; electrodeposition; high-aspect-ratio alumina–metal coaxial nanorod array;
  • fLanguage
    English
  • Journal_Title
    Microelectromechanical Systems, Journal of
  • Publisher
    ieee
  • ISSN
    1057-7157
  • Type

    jour

  • DOI
    10.1109/JMEMS.2010.2049823
  • Filename
    5475257