DocumentCode :
1506516
Title :
Fabrication of High-Aspect-Ratio Alumina–Nickel Coaxial Nanorod Array by Electrodeposition
Author :
Hsu, Chi-Wei ; Chou, Zhong-De ; Wang, Gou-Jen
Author_Institution :
Dept. of Mech. Eng., Nat. Chung-Hsing Univ., Taichung, Taiwan
Volume :
19
Issue :
4
fYear :
2010
Firstpage :
849
Lastpage :
853
Abstract :
In this paper, we investigate the fabrication of high-aspect-ratio (~500) larger area alumina-metal coaxial nanorod arrays using electrodeposition with an anodic aluminum oxide template. An annealing process was implemented after electrodeposition to enhance the mechanical properties of the deposited metal nanorods. Phosphoric acid was then used to gradually etch off the alumina that enclosed each individual metal nanorod starting from the borders between the hexagonal cells. The transmission electron microscopy and selected area electron diffraction analyses were implemented to verify the alumina/nickel coaxial structure. The alumina shell wrapping each individual metal nanorod served as an insulator for the core metal. The high aspect ratio of the alumina-metal coaxial nanorods described herein makes them practicable for use as nanoprobes or electrodes that are capable of penetrating individual cell membranes to sense the biological functions of the cells.
Keywords :
alumina; annealing; electrodeposition; electrodes; electron diffraction; nanofabrication; nanorods; nickel; transmission electron microscopy; Al2O3-Ni; alumina shell wrapping; alumina-nickel coaxial nanorod array; alumina-nickel coaxial structure; annealing process; anodic aluminum oxide template; biological functions; electrodeposition; electrodes; etching; hexagonal cells; high-aspect-ratio; mechanical properties; metal nanorods; nanoprobes; penetrating individual cell membranes; phosphoric acid; selected area electron diffraction analysis; transmission electron microscopy; Anodic aluminum oxide (AAO) template; electrodeposition; high-aspect-ratio alumina–metal coaxial nanorod array;
fLanguage :
English
Journal_Title :
Microelectromechanical Systems, Journal of
Publisher :
ieee
ISSN :
1057-7157
Type :
jour
DOI :
10.1109/JMEMS.2010.2049823
Filename :
5475257
Link To Document :
بازگشت