Title :
Charging mechanisms in nanostructured dielectrics for MEMS capacitive switches
Author :
Papaioannou, G. ; Michalas, L. ; Koutsoureli, M. ; Bansropun, S. ; Gantis, A. ; Ziaei, A.
Author_Institution :
Solid State Phys. Dept., Univ. of Athens, Athens, Greece
Abstract :
The paper investigates the dielectric charging in nanostructured materials already used or potential candidate for insulating films in MEMS capacitive switches. The investigation takes into account the percolation transport through grain boundaries in polycrystalline materials as well as trough nanoparticles, such as carbon nanotubes that are introduced to control the conductivity. The impact on conductivity and dielectric constant are also discussed.
Keywords :
carbon nanotubes; dielectric materials; electrical conductivity; insulating thin films; microswitches; nanostructured materials; percolation; permittivity; MEMS capacitive switches; carbon nanotubes; charging mechanisms; conductivity; dielectric charging; dielectric constant; grain boundaries; insulating films; nanostructured dielectrics; nanostructured materials; percolation transport; polycrystalline materials; trough nanoparticles; Conductivity; Diamonds; Dielectrics; Materials; Micromechanical devices; Radio frequency; Reliability; Dielectrics; charging effects; dielectric charging; nanostructured dielectrics; percolation;
Conference_Titel :
Silicon Monolithic Integrated Circuits in Rf Systems (SiRF), 2014 IEEE 14th Topical Meeting on
Conference_Location :
Newport Beach, CA
DOI :
10.1109/SiRF.2014.6828516
