Charging mechanisms in nanostructured dielectrics for MEMS capacitive switches

Author

Papaioannou, G. ; Michalas, L. ; Koutsoureli, M. ; Bansropun, S. ; Gantis, A. ; Ziaei, A.

Author_Institution

Solid State Phys. Dept., Univ. of Athens, Athens, Greece

fYear

2014

fDate

19-23 Jan. 2014

Firstpage

98

Lastpage

100

Abstract

The paper investigates the dielectric charging in nanostructured materials already used or potential candidate for insulating films in MEMS capacitive switches. The investigation takes into account the percolation transport through grain boundaries in polycrystalline materials as well as trough nanoparticles, such as carbon nanotubes that are introduced to control the conductivity. The impact on conductivity and dielectric constant are also discussed.

Keywords

carbon nanotubes; dielectric materials; electrical conductivity; insulating thin films; microswitches; nanostructured materials; percolation; permittivity; MEMS capacitive switches; carbon nanotubes; charging mechanisms; conductivity; dielectric charging; dielectric constant; grain boundaries; insulating films; nanostructured dielectrics; nanostructured materials; percolation transport; polycrystalline materials; trough nanoparticles; Conductivity; Diamonds; Dielectrics; Materials; Micromechanical devices; Radio frequency; Reliability; Dielectrics; charging effects; dielectric charging; nanostructured dielectrics; percolation;

fLanguage

English

Publisher

ieee

Conference_Titel

Silicon Monolithic Integrated Circuits in Rf Systems (SiRF), 2014 IEEE 14th Topical Meeting on

Conference_Location

Newport Beach, CA

Type

conf

DOI

10.1109/SiRF.2014.6828516

Filename

6828516