• DocumentCode
    1506824
  • Title

    Special Section on the International Conference on Microelectronic Test Structures

  • Author

    Allen, Richard A.

  • Author_Institution
    NIST, Gaithersburg, MD, USA
  • Volume
    25
  • Issue
    2
  • fYear
    2012
  • fDate
    5/1/2012 12:00:00 AM
  • Firstpage
    129
  • Lastpage
    129
  • Abstract
    The seven papers in this special section were originally presented at the 2009 International Conference on Microelectronics Test Structures (ICMTS).
  • Keywords
    Meetings; Microelectronics; Special issues and sections; Testing;
  • fLanguage
    English
  • Journal_Title
    Semiconductor Manufacturing, IEEE Transactions on
  • Publisher
    ieee
  • ISSN
    0894-6507
  • Type

    jour

  • DOI
    10.1109/TSM.2011.2181675
  • Filename
    6193275
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=1506824