Precise measurement of SAW velocity using SAW delay line

Author

Nomura, Tooru ; Yasuda, Tsutomu ; Shiokawa, Showko ; Moriizumi, Toyosaka

Author_Institution

Dept. of Electr. Commun., Shibaura Inst. of Technol., Tokyo, Japan

Volume

35

Issue

6

fYear

1988

Firstpage

646

Lastpage

651

Abstract

A method of nondestructive evaluation (NDE) by measuring the acoustic properties of materials using a surface-acoustic-wave (SAW) delay line is presented. A SAW delay line with three interdigital transducers (IDTs) deposited on a piezoelectric substrate is used to measure the SAW velocity of the sample material, using a fluid couplant. The SAW velocity is obtained from the frequency dependence of the delay line, and movement in the z-direction is not required. Measurements have been made for an anisotropic material at frequencies from 35 to 55 MHz. The experimental results agree well with the theoretical results. Moreover, it has been found that the focused SAW excited from a Fresnel-phase-plate IDT is suitable for mapping the two-dimensional variation of SAW velocity on an anisotropic sample surface.<>

Keywords

delay lines; surface acoustic wave devices; ultrasonic velocity measurement; 35 to 55 MHz; Fresnel-phase-plate; IDTs; NDE; SAW delay line; SAW velocity; interdigital transducers; nondestructive evaluation; piezoelectric substrate; surface-acoustic-wave; Acoustic materials; Acoustic measurements; Acoustic transducers; Anisotropic magnetoresistance; Delay lines; Frequency dependence; Piezoelectric materials; Piezoelectric transducers; Surface acoustic waves; Velocity measurement;

fLanguage

English

Journal_Title

Ultrasonics, Ferroelectrics, and Frequency Control, IEEE Transactions on

Publisher

ieee

ISSN

0885-3010

Type

jour

DOI

10.1109/58.9319

Filename

9319