Title :
Extended technique for complex permittivity measurement of dielectric films in the microwave region
Author :
Thomas, R. ; Dube, D.C.
Author_Institution :
Dept. of Phys., Indian Inst. of Technol., New Delhi, India
fDate :
1/30/1997 12:00:00 AM
Abstract :
An extended cavity resonance method using the TE10η mode is discussed for measuring complex permittivity of dielectric films and foils of flexible dimensions nondestructively. Working relations for dielectric parameters ε\´ and ε" are obtained on extending the validity of conventional cavity perturbation technique. Results of measurements performed on mylar are presented. The method is suitable for the determination of complex permittivity of dielectric thin films
Keywords :
cavity resonators; dielectric thin films; microwave measurement; permittivity measurement; TE10η mode; complex permittivity measurement; dielectric films; dielectric foils; extended cavity resonance method; microwave region; mylar; nondestructive method;
Journal_Title :
Electronics Letters
DOI :
10.1049/el:19970137