• DocumentCode
    1507637
  • Title

    A collector-up AlGaAs/GaAs heterojunction bipolar transistor fabricated using three-stage MOCVD

  • Author

    Kawai, H. ; Kobayashi, Takehiko ; Kaneko, K.

  • Author_Institution
    Sony Corp. Res. Center, Yokohama, Japan
  • Volume
    9
  • Issue
    8
  • fYear
    1988
  • Firstpage
    419
  • Lastpage
    421
  • Abstract
    A new collector-up AlGaAs/GaAs heterojunction bipolar transistor (HBT) is reported. This structure is designed to minimize parasitic capacitance and to eliminate trenches for making contacts. The emitter, external base, and intrinsic base and collector have been grown in three stages using metalorganic chemical vapor deposition (MOCVD). The current gain of this collector-up HBT (C-up HBT) with a 5*14- mu m/sup 2/ collector is 15.<>
  • Keywords
    III-V semiconductors; aluminium compounds; bipolar transistors; chemical vapour deposition; gallium arsenide; AlGaAs-GaAs; collector-up; current gain; emitter; external base; heterojunction bipolar transistor; intrinsic base; parasitic capacitance; three-stage MOCVD; trenches; Bipolar transistors; Buffer layers; Chemical vapor deposition; Fabrication; Gallium arsenide; Heterojunction bipolar transistors; Hydrogen; MOCVD; Parasitic capacitance; Wet etching;
  • fLanguage
    English
  • Journal_Title
    Electron Device Letters, IEEE
  • Publisher
    ieee
  • ISSN
    0741-3106
  • Type

    jour

  • DOI
    10.1109/55.764
  • Filename
    764