Title :
Study on S- and R-block construction with additional spinel blocks in sputter-deposited Ba ferrite films
Author :
Noma, K. ; Matsushita, N. ; Nakagawa, S. ; Naoe, M.
Author_Institution :
Dept. of Phys. Electron., Tokyo Inst. of Technol., Japan
fDate :
9/1/1997 12:00:00 AM
Abstract :
Ba ferrite sputtered films deposited using the sputtering gas of Xe-Ar-O2 exhibited large saturation magnetization 4πMs and perpendicular anisotropy constant K⊥ of 5.1 kG and 3.3×105 J/m3, respectively. The results on plasma diagnosis and the dependences of interplanar distance and 4πM, on the substrate temperature Ts imply that a number of Fe2+ ions exist in the films. The crystal structure analysis by XRD suggests that the films contain Ba ferrite crystallites with additional S-blocks
Keywords :
barium compounds; crystal microstructure; crystal structure; crystallites; ferrites; magnetic thin films; magnetisation; perpendicular magnetic anisotropy; sputter deposition; sputtered coatings; Ba ferrite crystallites; Ba ferrite sputtered films; BaFe12O19; Fe2+ ions; R-block construction; S-block construction; XRD; Xe-Ar-O2; crystal structure; interplanar distance; large saturation magnetization; perpendicular anisotropy constant; plasma diagnosis; spinel blocks; sputter-deposited Ba ferrite films; sputtering gas; substrate temperature; Anisotropic magnetoresistance; Crystallization; Ferrite films; Iron; Plasma diagnostics; Plasma temperature; Saturation magnetization; Sputtering; Temperature dependence; X-ray scattering;
Journal_Title :
Magnetics, IEEE Transactions on
