Synthesis of Nd-Fe-B thin films with high coercive force by cosputtering

Author

Piramanayagam, S.N. ; Matsumoto, M. ; Morisako, A. ; Takei, S.

Author_Institution

Dept. of Inf. Eng., Shinshu Univ., Nagano, Japan

Volume

33

Issue

5

fYear

1997

fDate

9/1/1997 12:00:00 AM

Firstpage

3643

Lastpage

3645

Abstract

NdFeB thin films were prepared by cosputtering of the individual elements and the magnetic properties were studied as a function of the concentration of Nd and B in the films. The dependence of coercive force, saturation magnetization and the energy product (B_r×H_c) on the composition are presented by three dimensional diagrams. High coercive force and high energy product was observed at Nd concentrations slightly higher than the stoichiometric composition. For a fixed composition, a dependence of coercive force as a function of thickness of the film was observed. The microstructure of the films also showed a variation as a function of thickness

Keywords

coercive force; crystal microstructure; ferromagnetic materials; iron compounds; magnetic thin films; magnetisation; neodymium compounds; permanent magnets; soft magnetic materials; sputter deposition; stoichiometry; Nd concentrations; Nd-Fe-B; Nd-Fe-B thin films; NdFeB thin films; coercive force; composition; cosputtering; energy product; film thickness; high coercive force; high energy product; magnetic properties; microstructure; saturation magnetization; stoichiometric composition; synthesis; three dimensional diagrams; Coercive force; Magnetic films; Magnetic properties; Microstructure; Neodymium; Semiconductor films; Sputtering; Temperature; Transistors; X-ray scattering;

fLanguage

English

Journal_Title

Magnetics, IEEE Transactions on

Publisher

ieee

ISSN

0018-9464

Type

jour

DOI

10.1109/20.619524

Filename

619524