Title :
Synthesis of Nd-Fe-B thin films with high coercive force by cosputtering
Author :
Piramanayagam, S.N. ; Matsumoto, M. ; Morisako, A. ; Takei, S.
Author_Institution :
Dept. of Inf. Eng., Shinshu Univ., Nagano, Japan
fDate :
9/1/1997 12:00:00 AM
Abstract :
NdFeB thin films were prepared by cosputtering of the individual elements and the magnetic properties were studied as a function of the concentration of Nd and B in the films. The dependence of coercive force, saturation magnetization and the energy product (Br×Hc) on the composition are presented by three dimensional diagrams. High coercive force and high energy product was observed at Nd concentrations slightly higher than the stoichiometric composition. For a fixed composition, a dependence of coercive force as a function of thickness of the film was observed. The microstructure of the films also showed a variation as a function of thickness
Keywords :
coercive force; crystal microstructure; ferromagnetic materials; iron compounds; magnetic thin films; magnetisation; neodymium compounds; permanent magnets; soft magnetic materials; sputter deposition; stoichiometry; Nd concentrations; Nd-Fe-B; Nd-Fe-B thin films; NdFeB thin films; coercive force; composition; cosputtering; energy product; film thickness; high coercive force; high energy product; magnetic properties; microstructure; saturation magnetization; stoichiometric composition; synthesis; three dimensional diagrams; Coercive force; Magnetic films; Magnetic properties; Microstructure; Neodymium; Semiconductor films; Sputtering; Temperature; Transistors; X-ray scattering;
Journal_Title :
Magnetics, IEEE Transactions on
