Title :
High coercivity SmFeAlC thin films fabricated by multilayer sputtering
Author :
Yan, M.L. ; Shan, Z.S. ; Liu, Y. ; Sellmyer, D.J.
Author_Institution :
Behlen Lab. of Phys., Nebraska Univ., Lincoln, NE, USA
fDate :
9/1/1997 12:00:00 AM
Abstract :
Multilayer sputtering of SmFe/C(Al) plus appropriate thermal processing has been used to fabricate SmFeC thin films with Al substitution for Fe. It was found that the SmFeAlC thin films exhibited exceptionally high coercivities. A coercivity of 28 kOe was realized for the thin film with structure of Ta(1000 Å)/[SmFe(40 Å)/C(Al)(5 Å)]×50/Ta(200 Å) with subsequent annealing at 650°C
Keywords :
aluminium alloys; annealing; coercive force; ferromagnetic materials; iron alloys; magnetic multilayers; samarium alloys; sputtered coatings; 650 C; SmFeAlC; high coercivity SmFeAlC thin films; multilayer sputtering; thermal processing; Annealing; Coercive force; Grain size; Magnetic films; Magnetic properties; Nonhomogeneous media; Sputtering; Temperature; Transistors; X-ray diffraction;
Journal_Title :
Magnetics, IEEE Transactions on
