Experimental Investigation of a Cavity-Mode Resonator Using a Micromachined Two-Dimensional Silicon Phononic Crystal in a Square Lattice

Author

Wang, Nan ; Tsai, J.M. ; Hsiao, Fu-Li ; Soon, B.W. ; Kwong, Dim-Lee ; Palaniapan, Moorthi ; Lee, Chengkuo

Author_Institution

Inst. of Microelectron., Agency for Sci., Technol. & Res., Singapore, Singapore

Volume

32

Issue

6

fYear

2011

fDate

6/1/2011 12:00:00 AM

Firstpage

821

Lastpage

823

Abstract

A 2-D silicon phononic crystal (PnC) slab of a square array of cylindrical air holes in a 10-μm-thick freestanding silicon plate with line defects is characterized as a cavity-mode PnC resonator. A piezoelectric aluminum nitride (AlN) film is employed as the interdigital transducers to transmit and detect acoustic waves, thus making the whole microfabrication process CMOS compatible. Both the band structure of the PnC and the transmission spectrum of the proposed PnC resonator are analyzed and optimized using finite-element method. The measured quality factor (Q factor) of the microfabricated PnC resonator is over 1000 at its resonant frequency of 152.46 MHz. The proposed PnC resonator shows promising acoustic resonance characteristics for radio-frequency communications and sensing applications.

Keywords

Q-factor; acoustic resonators; aluminium compounds; band structure; finite element analysis; photonic crystals; piezoelectric materials; radiocommunication; silicon; 2D micromachined silicon phononic crystal; AlN; Si; band structure; cavity-mode resonator; finite element method; frequency 152.46 MHz; interdigital transducer; piezoelectric aluminum nitride film; quality factor; radio-frequency communication; square lattice; transmission spectrum; Crystals; Frequency measurement; Photonic band gap; Q factor; Resonant frequency; Silicon; Slabs; CMOS compatible; Cavity mode; phononic crystal (PnC); resonator;

fLanguage

English

Journal_Title

Electron Device Letters, IEEE

Publisher

ieee

ISSN

0741-3106

Type

jour

DOI

10.1109/LED.2011.2136311

Filename

5763749