DocumentCode :
1511259
Title :
Frequency Tuning of 
-Coated Buckled Microbridges
Author :
Merced, Emmanuelle ; Cabrera, Rafmag ; Coy, Horacio ; Fernández, Félix E. ; SepÙlveda, Nelson
Author_Institution :
Dept. of Electr. & Comput. Eng., Univ. of Puerto Rico Mayaguez, Mayaguez, Puerto Rico
Volume :
20
Issue :
3
fYear :
2011
fDate :
6/1/2011 12:00:00 AM
Firstpage :
558
Lastpage :
560
Abstract :
This letter reports a resonant frequency shift of approximately - 23% for a VO2-coated silicon dioxide (SiO2) buckled microbridge when the coating´s insulator-to-metal transition (IMT) is thermally induced by heat conduction using a Peltier heater or by light irradiation from a laser diode. The frequency tuning is attributed to the large stress levels developed during the IMT and the large sensitivity of buckled microbridges to changes in stress.
Keywords :
Peltier effect; metal-insulator boundaries; micromechanical resonators; silicon compounds; vanadium compounds; Peltier heater; SiO2; VO2; buckled microbridges; frequency tuning; heat conduction; insulator-to-metal transition; laser diode; light irradiation; resonant frequency shift; stress levels; Bridges; Heating; Measurement by laser beam; Resonant frequency; Stress; Temperature measurement; Tuning; Buckled microbridges; phase transition materials; tunable microelectromechanical systems (MEMS); vanadium dioxide;
fLanguage :
English
Journal_Title :
Microelectromechanical Systems, Journal of
Publisher :
ieee
ISSN :
1057-7157
Type :
jour
DOI :
10.1109/JMEMS.2011.2140361
Filename :
5764491
Link To Document :
