An integrated micropermeameter for soft magnetic microstructures measurements

Author

Fayard, E. ; Albertini, J.B. ; Dominiak, M. ; Renaux, Ph ; Joisten, H.

Author_Institution

CEA, Centre d´´Etudes Nucleaires de Grenoble, France

Volume

33

Issue

5

fYear

1997

fDate

9/1/1997 12:00:00 AM

Firstpage

4017

Lastpage

4019

Abstract

A prototype of integrated micropermeameter has been achieved, using the batch process on silicon wafers developed for the fabrication of magnetic heads for helical scan recorders. Measuring the inductance of the integrated solenoids as a function of the frequency gives information on the effective permeability of the magnetic microstructure. This component can be used as a local magnetic material characterization tool, it can also be used as an inductive passive component with possible adjustment of its frequency range by the demagnetizing factor

Keywords

inductance; magnetic permeability measurement; soft magnetic materials; solenoids; batch process; demagnetizing factor; fabrication; helical scan recorder; inductance; integrated micropermeameter; magnetic head; passive component; silicon wafer; soft magnetic microstructure measurement; solenoid; Fabrication; Frequency measurement; Inductance measurement; Magnetic heads; Magnetic materials; Micromagnetics; Permeability measurement; Prototypes; Silicon; Solenoids;

fLanguage

English

Journal_Title

Magnetics, IEEE Transactions on

Publisher

ieee

ISSN

0018-9464

Type

jour

DOI

10.1109/20.619648

Filename

619648