Large coupling tolerance side-illuminated mirror photodiode for low-cost surface hybrid integration

For low-cost surface hybrid integration, we adopted a side-illuminated mirror photodiode (MPD). In the MPD structure, the incident light reflected at an angled facet of the V-groove on the bottom is absorbed in the detector area on the top. Large coupling tolerances of 34 μm for horizontal, 16 μm for vertical, and 100 μm for optical axis direction of fabricated MPD at 1-dB detected loss, are demonstrated. Low polarization-dependent loss is realized to adopt this MPD structure. The polarization-dependent loss of the fabricated MPD was only 0.06 dB.