Title :
FBAR Sensor Array for in Liquid Operation
Author :
Enlund, Johannes ; Martin, David M. ; Yantchev, Ventsislav ; Katardjiev, Ilia
Author_Institution :
Dept. of Solid State Electron., Uppsala Univ., Uppsala, Sweden
Abstract :
This letter discusses the design of thickness shear mode thin-film bulk acoustic resonator (FBAR) sensor array for in liquid operation with respect to minimizing the observed Q-degradation and crosstalk.
Keywords :
acoustic resonators; bulk acoustic wave devices; sensor arrays; FBAR sensor array; Q-degradation; crosstalk; liquid operation; thickness shear mode thin-film bulk acoustic resonator; Acoustic devices; Acoustic sensors; Acoustic waves; Biosensors; Conductivity; Crosstalk; Electrodes; Film bulk acoustic resonators; Sensor arrays; Thin film sensors; Aluminumnitride; biomedical transducers; bulk acoustic wave (BAW) devices; crosstalk;
Journal_Title :
Sensors Journal, IEEE
DOI :
10.1109/JSEN.2010.2051944
