DocumentCode
1514421
Title
The piezojunction effect in silicon sensors and circuits and its relation to piezoresistance
Author
Creemer, J. Fredrik ; Fruett, Fabiano ; Meijer, Gerard C M ; French, Paddy J.
Volume
1
Issue
2
fYear
2001
fDate
8/1/2001 12:00:00 AM
Firstpage
98
Keywords
Biosensors; Circuits; Laboratories; Materials science and technology; Mechanical sensors; Piezoresistance; Sensor phenomena and characterization; Silicon; Strain measurement; Stress;
fLanguage
English
Journal_Title
Sensors Journal, IEEE
Publisher
ieee
ISSN
1530-437X
Type
jour
DOI
10.1109/JSEN.2001.936927
Filename
936927
Link To Document