DocumentCode :
1514443
Title :
Galvanic cell formation: a review of approaches to silicon etching for sensor fabrication
Author :
Kelly, John J. ; Xia, Xinghua H. ; Ashruf, Colin M A ; French, Paddy J.
Volume :
1
Issue :
2
fYear :
2001
fDate :
8/1/2001 12:00:00 AM
Firstpage :
127
Keywords :
Anisotropic magnetoresistance; Biomembranes; Etching; Fabrication; Galvanizing; Passivation; Sensor phenomena and characterization; Silicon; Solids; Surface morphology;
fLanguage :
English
Journal_Title :
Sensors Journal, IEEE
Publisher :
ieee
ISSN :
1530-437X
Type :
jour
DOI :
10.1109/JSEN.2001.936930
Filename :
936930
Link To Document :
https://search.ricest.ac.ir/dl/search/defaultta.aspx?DTC=49&DC=1514443
