DocumentCode :
1514455
Title :
Nanometer-scale force sensing with MEMS devices
Author :
Kenny, Thomas
Volume :
1
Issue :
2
fYear :
2001
fDate :
8/1/2001 12:00:00 AM
Firstpage :
148
Keywords :
Biosensors; Chemical and biological sensors; Force sensors; Instruments; Magnetic sensors; Microelectromechanical devices; Micromechanical devices; Nanoscale devices; Optical device fabrication; Optical sensors;
fLanguage :
English
Journal_Title :
Sensors Journal, IEEE
Publisher :
ieee
ISSN :
1530-437X
Type :
jour
DOI :
10.1109/JSEN.2001.936932
Filename :
936932
Link To Document :
https://search.ricest.ac.ir/dl/search/defaultta.aspx?DTC=49&DC=1514455
