Microlens Array on Flip-Chip LED Patterned With an Ultraviolet Micro-Pixelated Emitter

Author

Zhu, L. ; Lai, P.T. ; Choi, H.W.

Author_Institution

Dept. of Electr. & Electron. Eng., Univ. of Hong Kong, Hong Kong, China

Volume

23

Issue

15

fYear

2011

Firstpage

1067

Lastpage

1069

Abstract

A direct-write lithographic technique for the fabrication of micro-lens arrays with an ultraviolet (UV) micro-light-emitting diode (LED) array serving as an exposure source is reported. Polymer microlens arrays of high optical quality have been fabricated on the sapphire side of a flip-chip truncated-conic (TC) LED. The properties of the lenses are evaluated by optical microscopy and atomic force microscopy. The determined focal length is close to the predicted value. The effects of microlens integration on the optical properties of the LED are investigated.

Keywords

atomic force microscopy; flip-chip devices; gallium compounds; indium compounds; integrated optics; integrated optoelectronics; light emitting diodes; lithography; microlenses; optical arrays; optical fabrication; optical microscopy; optical polymers; sapphire; Al₂O₃; AlGaN-GaN; Polymer; atomic force microscopy; direct write lithography; flip chip LED; focal length; microlens array; optical microscopy; polymer; sapphire; truncated conic LED; ultraviolet micropixelated emitter; Arrays; Lenses; Light emitting diodes; Microoptics; Optical surface waves; Pixel; Stimulated emission; Direct-write; micro-lens; micro-light emitting diode (micro-LED);

fLanguage

English

Journal_Title

Photonics Technology Letters, IEEE

Publisher

ieee

ISSN

1041-1135

Type

jour

DOI

10.1109/LPT.2011.2154323

Filename

5766011