Abstract :
The individual sessions of the conference covered a wide variety of topics, including fab design, strategy and management, manufacturing control and execution, defect reduction and yield enhancement, ultra clean technology, process and metrology equipment, process and materials optimization, and environmental issues
Keywords :
semiconductor technology; environmental factors; fab management; semiconductor manufacturing; ultra-clean technology; Electronics industry; Manufacturing industries; Manufacturing processes; Meetings; Metallization; Optimized production technology; Semiconductor device manufacture; Semiconductor materials; Technological innovation; Technology management;
