Fabrication of Low-Loss Silicon Photonic Wires by Self-Profile Transformation and Applications in 3-D Photonic Integration and Nonlinear Optics

Author

Lee, Ming-Chang M. ; Chiu, Wei-Chao ; Yang, Tse-Ming ; Chen, Chin-Hung ; Lu, Cheng-Yen ; Lin, Gong-Ru

Author_Institution

Inst. of Photonics Technol., Nat. Tsing Hua Univ., Hsinchu, Taiwan

Volume

46

Issue

5

fYear

2010

fDate

5/1/2010 12:00:00 AM

Firstpage

650

Lastpage

657

Abstract

A new technology using self-profile transformation is introduced to make subwavelength silicon photonic wires with very smooth surface. Due to the smooth surface, the propagation loss was measured to be as low as 1.26 dB/cm. Moreover, 2-D beam spot-size converters and 2-D multimode interference couplers were demonstrated to monolithically integrate the photonic wires, showing the possibility of 3-D photonic integration. Owing to the low-insertion loss of the wires, various nonlinear optical processes such as four-wave mixing and spontaneous Raman emission were observed with low-pump power of just tens of milliwatts.

Keywords

integrated optoelectronics; nonlinear optics; optical fabrication; optical losses; silicon; low loss silicon photonic wires; low-insertion loss; nonlinear optics; optical fabrication; photonic integration; self profile transformation; Couplers; Interference; Loss measurement; Nonlinear optics; Optical device fabrication; Optical losses; Photonics; Propagation losses; Silicon; Wires; Annealing; integrated optics; nonlinear optics; silicon on insulator technology;

fLanguage

English

Journal_Title

Quantum Electronics, IEEE Journal of

Publisher

ieee

ISSN

0018-9197

Type

jour

DOI

10.1109/JQE.2010.2047328

Filename

5485043