Optimizing multichamber work cell management: an application to a DRAM wafer fab

Author

Arbib, Claudio ; Iuliano, Guglielmo ; Da Soghe, Antonio

Author_Institution

Dept. of Math., Univ. degli Studi di L´´Aquila, Italy

Volume

14

Issue

3

fYear

2001

fDate

8/1/2001 12:00:00 AM

Firstpage

265

Lastpage

272

Abstract

The management of a work cell consisting of multichamber systems Endura 5500 PVD is addressed with the goals of maximizing production volume and facilitating maintenance plans. These objectives are pursued through suitable system configuration and loading. A mixed integer linear programming model incorporating such requirements as workload equalization and fault tolerance is devised to find optimal chamber assembly. The nominal productivity under distinct feasible production modes is evaluated by simulating Endura operation scheduling, and then utilized as problem input to compute nominal work cell productivity under steady-state inventory conditions. This method has been successfully adopted in an actual wafer fab to determine sputtering capacity allocation

Keywords

DRAM chips; cluster tools; integer programming; integrated circuit manufacture; linear programming; sputter deposition; DRAM wafer fab; Endura 5500 PVD; fault tolerance; maintenance plan; material flow; mixed integer linear programming model; multichamber system; operation scheduling; optimization; production volume; productivity; semiconductor manufacturing; sputtering; work cell management; Assembly; Atherosclerosis; Computational modeling; Fault tolerance; Mixed integer linear programming; Processor scheduling; Production systems; Productivity; Sputtering; Steady-state;

fLanguage

English

Journal_Title

Semiconductor Manufacturing, IEEE Transactions on

Publisher

ieee

ISSN

0894-6507

Type

jour

DOI

10.1109/66.939826

Filename

939826