DocumentCode
1518022
Title
Role of Nitrogen in the Formation of
Films by Pulsed Laser Deposition
Author
Wang, Zhiping ; Ito, Hiroaki ; Masugata, Katsumi
Author_Institution
Dept. of Electr. & Electron. Eng., Univ. of Toyama, Toyama, Japan
Volume
40
Issue
7
fYear
2012
fDate
7/1/2012 12:00:00 AM
Firstpage
1815
Lastpage
1819
Abstract
Carbon nitride (CNx) films, deposited by pulsed laser deposition (PLD) in nitrogen (N2) atmosphere, were studied with respect to mechanical, morphological, compositional, structural, and optical properties. All the samples were prepared at room temperature and under various N2 pressures, ranging from vacuum up to 50 Pa. Nitrogen concentration ( CN) rapidly increases with increasing N2 pressure and reaches to a saturated value above 10 Pa. The Raman results reveal that the D/G ratio increases with the increase in N2 pressure, contributing the graphitization of carbon films. With further addition of nitrogen into carbon films, optical transmission is enhanced. Localization of the electrons due to the heteropolar bonding and the high porosity of the CNx samples are speculated to be the reason of enhancement in optical transmission.
Keywords
Raman spectra; bonds (chemical); carbon compounds; electron probe analysis; graphitisation; nanoindentation; porosity; pulsed laser deposition; thin films; π electrons; CNx; D/G ratio; N2 atmosphere; N2 pressures; Raman spectra; carbon nitride film formation; compositional properties; graphitization; heteropolar bonding; mechanical properties; morphological properties; nitrogen atmosphere; nitrogen concentration; optical properties; optical transmission; porosity; pulsed laser deposition; structural properties; temperature 293 K to 298 K; Carbon; Educational institutions; Films; Nitrogen; Optical saturation; Pulsed laser deposition; Carbon nitride; nitrogen gas effect; pulsed laser deposition (PLD);
fLanguage
English
Journal_Title
Plasma Science, IEEE Transactions on
Publisher
ieee
ISSN
0093-3813
Type
jour
DOI
10.1109/TPS.2012.2197224
Filename
6200882
Link To Document