• DocumentCode
    1518531
  • Title

    Integrated Optofluidic Iris

  • Author

    Müller, Philipp ; Feuerstein, Roland ; Zappe, Hans

  • Author_Institution
    Dept. of Microsyst. Eng. (IMTEK), Univ. of Freiburg, Freiburg, Germany
  • Volume
    21
  • Issue
    5
  • fYear
    2012
  • Firstpage
    1156
  • Lastpage
    1164
  • Abstract
    An optofluidic iris, which uses the absorption of an opaque liquid in combination with a second transparent liquid for defining optical apertures of variable diameters, tuned by directly deforming a ring-shaped liquid-liquid interface using electrowetting on dielectrics, is presented. The novelty lies not only in the absence of any moving parts or membranes but also in the design of the liquid ring, which allows planar microfabrication processes to be used exclusively for defining all functional parts of the iris. When compared to other optofluidic approaches, this concept combines ultracompactness, full integration, moderate drive voltage (75 V), low power consumption (<; 5 mW), highly robust and repeatable tunability, adequate tuning speed (<; 1 s), high uniform transmission (>; 86%), and an optical quality suitable for imaging applications, with a fabrication process which will allow mass fabrication.
  • Keywords
    integrated optics; light transmission; micro-optics; microfabrication; microfluidics; optical design techniques; optical fabrication; optical tuning; power consumption; wetting; deformation; drive voltage; electrowetting on dielectrics; functional parts; imaging applications; integrated optofluidic iris; liquid ring design; mass fabrication; opaque liquid absorption; optical apertures; optical quality; planar microfabrication; power consumption; repeatable tunability; ring-shaped liquid-liquid interface; transparent liquid; tuning speed; ultracompactness; uniform transmission; Apertures; Dielectrics; Electrodes; Ink; Optical device fabrication; Shape; Tuning; Electrowetting on dielectrics (EWOD); iris; microoptics; optofluidics; variable aperture;
  • fLanguage
    English
  • Journal_Title
    Microelectromechanical Systems, Journal of
  • Publisher
    ieee
  • ISSN
    1057-7157
  • Type

    jour

  • DOI
    10.1109/JMEMS.2012.2196498
  • Filename
    6202312