DocumentCode :
1518531
Title :
Integrated Optofluidic Iris
Author :
Müller, Philipp ; Feuerstein, Roland ; Zappe, Hans
Author_Institution :
Dept. of Microsyst. Eng. (IMTEK), Univ. of Freiburg, Freiburg, Germany
Volume :
21
Issue :
5
fYear :
2012
Firstpage :
1156
Lastpage :
1164
Abstract :
An optofluidic iris, which uses the absorption of an opaque liquid in combination with a second transparent liquid for defining optical apertures of variable diameters, tuned by directly deforming a ring-shaped liquid-liquid interface using electrowetting on dielectrics, is presented. The novelty lies not only in the absence of any moving parts or membranes but also in the design of the liquid ring, which allows planar microfabrication processes to be used exclusively for defining all functional parts of the iris. When compared to other optofluidic approaches, this concept combines ultracompactness, full integration, moderate drive voltage (75 V), low power consumption (<; 5 mW), highly robust and repeatable tunability, adequate tuning speed (<; 1 s), high uniform transmission (>; 86%), and an optical quality suitable for imaging applications, with a fabrication process which will allow mass fabrication.
Keywords :
integrated optics; light transmission; micro-optics; microfabrication; microfluidics; optical design techniques; optical fabrication; optical tuning; power consumption; wetting; deformation; drive voltage; electrowetting on dielectrics; functional parts; imaging applications; integrated optofluidic iris; liquid ring design; mass fabrication; opaque liquid absorption; optical apertures; optical quality; planar microfabrication; power consumption; repeatable tunability; ring-shaped liquid-liquid interface; transparent liquid; tuning speed; ultracompactness; uniform transmission; Apertures; Dielectrics; Electrodes; Ink; Optical device fabrication; Shape; Tuning; Electrowetting on dielectrics (EWOD); iris; microoptics; optofluidics; variable aperture;
fLanguage :
English
Journal_Title :
Microelectromechanical Systems, Journal of
Publisher :
ieee
ISSN :
1057-7157
Type :
jour
DOI :
10.1109/JMEMS.2012.2196498
Filename :
6202312
Link To Document :
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