Title :
Fast Imaging Investigation on Pulsed Magnetron Discharge
Author :
Costin, Claudiu ; Tiron, Vasile ; Faustin, Jonathan ; Popa, Gheorghe
Author_Institution :
Fac. of Phys., Alexandru loan Cuza Univ., Iasi, Romania
Abstract :
A time-resolved fast imaging technique was applied for the investigation of both gas (Ar) and sputtered material (Al) excited species in a high-power short-pulse magnetron discharge.
Keywords :
aluminium; argon; glow discharges; magnetrons; plasma diagnostics; plasma materials processing; plasma sources; plasma-wall interactions; sputtering; surface treatment; Al; Ar; excited argon gas species; high power short pulse magnetron discharge; pulsed magnetron discharge; sputtered excited aluminium species; time resolved fast imaging technique; Argon; Atomic measurements; Discharges; Magnetic resonance imaging; Metals; Fast imaging; high-power impulse magnetron;
Journal_Title :
Plasma Science, IEEE Transactions on
DOI :
10.1109/TPS.2011.2145005
