Nonlocal Behavior of Electron Fluxes and Excitation Rates for “Local” EEDF in Moderate and High Pressures DC Positive Column Plasmas

Author

Chirtsov, Alexander S. ; Kapustin, Kirill D. ; Kudryavtsev, Anatoly A. ; Bogdanov, Evgeny A.

Author_Institution

Fac. of Phys., St. Petersburg State Univ., St. Petersburg, Russia

Volume

39

Issue

11

fYear

2011

Firstpage

2580

Lastpage

2581

Abstract

Kinetic simulations of a direct-current positive-column Ar plasma revealed that electron fluxes are sensitive to energy dependence of an elastic collision cross section. Paradoxical behavior of the electron flux in a coordinate-energy phase space is presented. The direction of the electron flux at the “elastic” energy region (5-10 eV) in whole volume, except the region near the wall, turned out to be oppositely directed to that conventionally assumed.

Keywords

argon; plasma collision processes; plasma density; plasma kinetic theory; plasma simulation; plasma temperature; Ar; coordinate energy phase space; elastic collision cross section; elastic energy region; electron energy distribution function; electron flux nonlocal behavior; electron volt energy 5 eV to 10 eV; energy dependence; excitation rate nonlocal behavior; high pressure DC positive column plasmas; kinetic simulations; local EEDF; moderate pressure DC positive column plasmas; positive column argon plasma; Argon; Computational modeling; Distribution functions; Kinetic theory; Mathematical model; Plasmas; Electron kinetic; plasma physics;

fLanguage

English

Journal_Title

Plasma Science, IEEE Transactions on

Publisher

ieee

ISSN

0093-3813

Type

jour

DOI

10.1109/TPS.2011.2140385

Filename

5770235