AC-DC thermal converter with infrared-transmissive fiber coupling

Author

Katzmann, Fred L. ; Klonz, Manfred

Author_Institution

Montclair Sci. Instrum., Cedar Grove, NJ, USA

Volume

48

Issue

2

fYear

1999

fDate

4/1/1999 12:00:00 AM

Firstpage

415

Lastpage

417

Abstract

AC-DC thermal converters are fabricated by depositing thin-film heaters on thin dielectric membranes on a silicon chip and by remotely sensing their temperature with radiation sensors through infrared transmissive fibers. This permits all degrees of freedom for the design of the heater for optimum frequency response. In the present design the sensitivity is quite small. With a temperature of the heater 100 K above ambient, only 5 μW heats up the black spot target of the radiation sensor, resulting in an output voltage of 1.5 mV. The standard deviation of the mean of an AC-DC voltage transfer involving 12 measurements is approximately 20×10^-6 to 50×10^-6

Keywords

convertors; fibre optic sensors; frequency response; infrared detectors; thermopiles; transfer standards; voltage measurement; 1.5 mV; 5 muW; AC-DC thermal converter; AC-DC voltage transfer standard; IR detector; IR-transmissive fiber coupling; Joule heating; bifilar design; black spot target; optimum frequency response; radiation sensors; remote temperature sensing; sensitivity; silicon chip; thermopile detector; thin dielectric membranes; thin-film heaters; Analog-digital conversion; Dielectric thin films; Infrared heating; Infrared sensors; Optical fiber sensors; Semiconductor thin films; Sputtering; Temperature sensors; Thermal sensors; Voltage;

fLanguage

English

Journal_Title

Instrumentation and Measurement, IEEE Transactions on

Publisher

ieee

ISSN

0018-9456

Type

jour

DOI

10.1109/19.769614

Filename

769614