• DocumentCode
    1519647
  • Title

    Microwave-generated plasma in air under standard conditions

  • Author

    Von Hagen, Jürgen ; Venot, Yan ; Zhang, Ying ; Wiesbeck, Werner

  • Author_Institution
    Inst. fur Hochsfrequenztech., Karlsruhe Univ., Germany
  • Volume
    29
  • Issue
    4
  • fYear
    2001
  • fDate
    8/1/2001 12:00:00 AM
  • Firstpage
    604
  • Lastpage
    608
  • Abstract
    The possibility and feasibility of microwave-excited plasmas in air under standard conditions, as well as under moderate pressures of up to 5 bar, is demonstrated by using a quarter-wave coaxial resonator. The microwave energy is coupled into the resonator by an inductive loop attaining a match of better -15 dB. The equivalent circuit of the resonator allows to determine intrinsic resistance, inductance, and capacitance, additionally, the quality factor and, finally, the field strength inside the resonator can be deduced. By using this approximation a breakdown field of 300 kV/m is computed. The power levels used for exciting microwave plasmas are low enough to be manageable, e.g., 35 W
  • Keywords
    air; capacitance; high-frequency discharges; inductance; plasma pressure; plasma production; resonators; 35 W; air; breakdown field; capacitance; equivalent circuit; field strength; inductance; inductive loop; intrinsic resistance; microwave energy; microwave plasma excitation; microwave-generated plasma; power levels; quarter-wave coaxial resonator; resonator; standard conditions; Circuits; Coaxial components; Electric breakdown; Electromagnetic heating; Gases; High power microwave generation; Impedance; Microwave generation; Plasma applications; Plasma devices;
  • fLanguage
    English
  • Journal_Title
    Plasma Science, IEEE Transactions on
  • Publisher
    ieee
  • ISSN
    0093-3813
  • Type

    jour

  • DOI
    10.1109/27.940954
  • Filename
    940954