DocumentCode
1519647
Title
Microwave-generated plasma in air under standard conditions
Author
Von Hagen, Jürgen ; Venot, Yan ; Zhang, Ying ; Wiesbeck, Werner
Author_Institution
Inst. fur Hochsfrequenztech., Karlsruhe Univ., Germany
Volume
29
Issue
4
fYear
2001
fDate
8/1/2001 12:00:00 AM
Firstpage
604
Lastpage
608
Abstract
The possibility and feasibility of microwave-excited plasmas in air under standard conditions, as well as under moderate pressures of up to 5 bar, is demonstrated by using a quarter-wave coaxial resonator. The microwave energy is coupled into the resonator by an inductive loop attaining a match of better -15 dB. The equivalent circuit of the resonator allows to determine intrinsic resistance, inductance, and capacitance, additionally, the quality factor and, finally, the field strength inside the resonator can be deduced. By using this approximation a breakdown field of 300 kV/m is computed. The power levels used for exciting microwave plasmas are low enough to be manageable, e.g., 35 W
Keywords
air; capacitance; high-frequency discharges; inductance; plasma pressure; plasma production; resonators; 35 W; air; breakdown field; capacitance; equivalent circuit; field strength; inductance; inductive loop; intrinsic resistance; microwave energy; microwave plasma excitation; microwave-generated plasma; power levels; quarter-wave coaxial resonator; resonator; standard conditions; Circuits; Coaxial components; Electric breakdown; Electromagnetic heating; Gases; High power microwave generation; Impedance; Microwave generation; Plasma applications; Plasma devices;
fLanguage
English
Journal_Title
Plasma Science, IEEE Transactions on
Publisher
ieee
ISSN
0093-3813
Type
jour
DOI
10.1109/27.940954
Filename
940954
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