Title :
RFID MEMS Sensor Concept Based on Intermodulation Distortion
Author :
Viikari, Ville ; Seppä, Heikki
Author_Institution :
VTT Tech. Res. Centre, Espoo, Finland
Abstract :
This paper presents a passive wireless microelectromechanical systems (MEMS) sensor consisting of an antenna directly matched to a MEMS resonator. When the sensor is actuated at two signals at different frequencies it replies at an intermodulation frequency. An analytical equation for the mixing efficiency of a MEMS sensor is derived and verified by harmonic balance simulations. The concept is demonstrated experimentally and shown to be feasible for implementing sensors or tags readable across large distances.
Keywords :
intermodulation distortion; micromechanical resonators; microsensors; radiofrequency identification; wireless sensor networks; MEMS resonator; RFID MEMS sensor concept; harmonic balance simulation; intermodulation distortion; passive wireless microelectromechanical systems sensor; Analytical models; Equations; Frequency; Harmonic analysis; Intermodulation distortion; Microelectromechanical systems; Micromechanical devices; Radiofrequency identification; Sensor systems; Wireless sensor networks; Mixers; radio frequency (RF) microelectromechanical systems (MEMS); radio frequency identification (RFID); wireless sensors;
Journal_Title :
Sensors Journal, IEEE
DOI :
10.1109/JSEN.2009.2031809
