RFID MEMS Sensor Concept Based on Intermodulation Distortion

Author

Viikari, Ville ; Seppä, Heikki

Author_Institution

VTT Tech. Res. Centre, Espoo, Finland

Volume

9

Issue

12

fYear

2009

Firstpage

1918

Lastpage

1923

Abstract

This paper presents a passive wireless microelectromechanical systems (MEMS) sensor consisting of an antenna directly matched to a MEMS resonator. When the sensor is actuated at two signals at different frequencies it replies at an intermodulation frequency. An analytical equation for the mixing efficiency of a MEMS sensor is derived and verified by harmonic balance simulations. The concept is demonstrated experimentally and shown to be feasible for implementing sensors or tags readable across large distances.

Keywords

intermodulation distortion; micromechanical resonators; microsensors; radiofrequency identification; wireless sensor networks; MEMS resonator; RFID MEMS sensor concept; harmonic balance simulation; intermodulation distortion; passive wireless microelectromechanical systems sensor; Analytical models; Equations; Frequency; Harmonic analysis; Intermodulation distortion; Microelectromechanical systems; Micromechanical devices; Radiofrequency identification; Sensor systems; Wireless sensor networks; Mixers; radio frequency (RF) microelectromechanical systems (MEMS); radio frequency identification (RFID); wireless sensors;

fLanguage

English

Journal_Title

Sensors Journal, IEEE

Publisher

ieee

ISSN

1530-437X

Type

jour

DOI

10.1109/JSEN.2009.2031809

Filename

5297257