Compact Model of Drain Current in Short-Channel Triple-Gate FinFETs

An analytical compact drain current model for undoped (or lightly doped) short-channel triple-gate fin-shaped field-effect transistors (finFETs) is presented, taking into account quantum-mechanical and short-channel effects such as threshold-voltage shifts, drain-induced barrier lowering, and subthreshold slope degradation. In the saturation region, the effects of series resistance, surface roughness scattering, channel length modulation, and saturation velocity were also considered. The proposed model has been validated by comparing the transfer and output characteristics with device simulations and with experimental results. The good accuracy and the symmetry of the model make it suitable for implementation in circuit simulation tools.