DocumentCode
1520364
Title
Sampling electrostatic force probing using pulse position modulation technique
Author
Said, R.A.
Author_Institution
Electr. Eng. Dept., United Arab Emirates Univ., Al-Ain, United Arab Emirates
Volume
37
Issue
16
fYear
2001
fDate
8/2/2001 12:00:00 AM
Firstpage
1020
Lastpage
1021
Abstract
A sampling electrostatic force microscopy method utilising a pulse position modulation technique is demonstrated. High frequency arbitrary waveforms within integrated circuits are measured by down converting the high frequency spectrum of the circuit waveform to within the active frequency band of the mechanical frequency response of the probe
Keywords
electrostatic devices; integrated circuit measurement; pulse position modulation; scanning probe microscopy; voltage measurement; active frequency band; electrostatic force microscopy; high frequency spectrum; integrated circuit; mechanical frequency response; pulse position modulation; sampling probe; voltage waveform measurement;
fLanguage
English
Journal_Title
Electronics Letters
Publisher
iet
ISSN
0013-5194
Type
jour
DOI
10.1049/el:20010697
Filename
941806
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