Title :
Sampling electrostatic force probing using pulse position modulation technique
Author_Institution :
Electr. Eng. Dept., United Arab Emirates Univ., Al-Ain, United Arab Emirates
fDate :
8/2/2001 12:00:00 AM
Abstract :
A sampling electrostatic force microscopy method utilising a pulse position modulation technique is demonstrated. High frequency arbitrary waveforms within integrated circuits are measured by down converting the high frequency spectrum of the circuit waveform to within the active frequency band of the mechanical frequency response of the probe
Keywords :
electrostatic devices; integrated circuit measurement; pulse position modulation; scanning probe microscopy; voltage measurement; active frequency band; electrostatic force microscopy; high frequency spectrum; integrated circuit; mechanical frequency response; pulse position modulation; sampling probe; voltage waveform measurement;
Journal_Title :
Electronics Letters
DOI :
10.1049/el:20010697
