Title :
Improved Resistance Switching Characteristics in Ti-Doped
for Resistive Nonvolatile Memory Devices
Author :
Mondal, Somnath ; Her, Jim-Long ; Chen, Fa-Hsyang ; Shih, Shao-Ju ; Pan, Tung-Ming
Author_Institution :
Dept. of Electron. Eng., Chang Gung Univ., Taoyuan, Taiwan
fDate :
7/1/2012 12:00:00 AM
Abstract :
A conventional approach of doping to control the bistable resistance switching in Yb2O3 was investigated for nonvolatile memory applications. With the help of Ti doping into oxide films during the process, better cycle-to-cycle resistance distribution and switching voltage uniformity were found due to modulation of current conduction mechanism from space-charge-limited current in Yb2O3 to Schottky type in YbTiOx. The program/erase cycles with successive readout operation over 105 cycles can be achieved without any degradation. No data loss was found upon continuous readout process at both room temperature and 85°C. The Ni/YbTiOx/TaN memory is a promising candidate to be integrated into future memory processes.
Keywords :
modulation; random-access storage; space-charge-limited conduction; titanium; ytterbium compounds; Schottky type; Yb2O3:Ti; continuous readout processing; current conduction mechanism modulation; cycle-to-cycle resistance distribution; data loss; improved bistable resistance switching characteristic; program-erase cycle; resistive nonvolatile memory device; space-charge-limited current; successive readout operation; switching voltage uniformity; temperature 293 K to 298 K; temperature 85 degC; Doping; Electron devices; Materials; Nickel; Nonvolatile memory; Resistance; Switches; $hbox{YbTiO}_{x}$; $hbox{Yb}_{2}hbox{O}_{3}$; Doping; Ni; TaN; resistive random access memory (ReRAM);
Journal_Title :
Electron Device Letters, IEEE
DOI :
10.1109/LED.2012.2196672