DocumentCode
1521055
Title
Plasma Expansion From a Radio Frequency Microdischarge
Author
Boswell, Rod ; Charles, Christine ; Alexander, Peter ; Dedrick, James ; Takahashi, Kazunori
Author_Institution
Space Plasma, Power & Propulsion Lab., Australian Nat. Univ., Canberra, ACT, Australia
Volume
39
Issue
11
fYear
2011
Firstpage
2512
Lastpage
2513
Abstract
Plasma expansion of a capacitively coupled radio frequency (13.56 MHz) argon microdischarge into a larger glass tube is studied by acquisition and analysis of high-resolution digital images. The microdischarge operating conditions are a flow of about 1.5 L/min, a pressure of 7 torr, and a power of 10 W. Interesting plume patterns can be generated, and an example of plasma striations within the plume is shown.
Keywords
argon; high-frequency discharges; plasma diagnostics; Ar; capacitively coupled radio frequency argon microdischarge; frequency 13.56 MHz; high-resolution digital images; larger glass tube; microdischarge operating conditions; plasma expansion; plasma striation analysis; plume pattern analysis; power 10 W; pressure 7 torr; Apertures; Argon; Electron tubes; Particle beams; Plasmas; Propulsion; Radio frequency; Aerospace engineering; plasma sources;
fLanguage
English
Journal_Title
Plasma Science, IEEE Transactions on
Publisher
ieee
ISSN
0093-3813
Type
jour
DOI
10.1109/TPS.2011.2143434
Filename
5771122
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