Title :
Loss Measurement of Aluminum Thin-Film Coplanar Waveguide (CPW) Lines at Microwave Frequencies
Author :
Ramazani, Maliheh ; Miladi, Haddad ; Shahabadi, Mahmoud ; Mohajerzadeh, Shamsoddin
Author_Institution :
Thin Film & Nanoelectron. Lab., Univ. of Tehran, Tehran, Iran
Abstract :
To investigate coplanar waveguide (CPW) attenuation in monolithic microwave integrated circuits, measurements are carried out within 15-26 GHz on several CPW resonators with different metal thicknesses ranging from 200 to 2300 nm. In these experiments, the thin metal layers are made of aluminum. We will present a method for extracting the quality factor from the measured S-parameters of the CPW resonators.
Keywords :
MMIC; Q-factor; S-parameters; aluminium; coplanar waveguides; resonators; thin films; CPW attenuation; CPW resonators; S-parameters; aluminum thin-film coplanar waveguide lines; frequency 15 GHz to 26 GHz; loss measurement; microwave frequencies; monolithic microwave integrated circuits; quality factor; size 200 nm to 2300 nm; Aluminum; Attenuation; Coplanar waveguides; Frequency measurement; Integrated circuit measurements; Loss measurement; Microwave frequencies; Microwave measurements; Thin film circuits; Transistors; Coplanar waveguide (CPW); microwave frequency; monolithic microwave integrated circuits (MMICs); quality factor ($Q$ -factor); thin metal film;
Journal_Title :
Electron Devices, IEEE Transactions on
DOI :
10.1109/TED.2010.2050110
