Title :
Optical fiber for deep ultraviolet light
Author :
Oto, M. ; Kikugawa, S. ; Sarukura, N. ; Hirano, M. ; Hosono, H.
Author_Institution :
Show Electr. Wire & Cable Co. Ltd., Sagamihara, Japan
Abstract :
Deep ultraviolet optical fibers are fabricated using modified SiO/sub 2/ glasses containing 2000-ppm fluorine for the clad and 200 ppm for the core. The transmission at 193 nm is improved to more than 60%/m by optimizing the fiber drawing condition. The H/sub 2/-inpregnation into the fiber suppresses the degradation of the transmission by irradiation of ArF excimer laser (50 mJ/cm/sup 2//pulse). Further improvement may be expected by reducing oxygen-deficient center (I) defect generation in the drawing process.
Keywords :
drawing (mechanical); fluorine; hydrogen; optical fibre cladding; optical fibre fabrication; optical glass; silicon compounds; 193 nm; ArF; ArF excimer laser irradiation; H/sub 2/-inpregnation; SiO/sub 2/:F,H/sub 2/; clad; core; deep ultraviolet light; fiber drawing condition; fluorine; modified SiO/sub 2/ glasses; optical fibers; oxygen-deficient center (I) defect generation; transmission; transmission degradation; Fiber lasers; Glass; Lithography; Optical fibers; Optical materials; Optical refraction; Optical sensors; Optical variables control; Propagation losses; Solid lasers;
Journal_Title :
Photonics Technology Letters, IEEE
